1、原文The 21stCenturys Silicon microelectronics1IntroductionLooking at the development of human society in the history of civilization, all the production mode and lifestyle of the major and new technologies have caused, science and technology as revolutionary force, and promote the development of human
2、 society. More than 50 years ago from the invention of the transistor to the current microelectronics technology to become the basis of the information society and the historical development of the core fully proved that science and technology are the primary productive forces. Information is object
3、ive things state and the characteristics of a universal movement forms, together with the materials and energy is an important resource for human society, but its use is just the beginning. Currently facing the information revolution to digitalization and networking as a feature. Digital has greatly
4、 improved the peoples access to information, and better meet the peoples demand for information, and network makes it more convenient for people to exchange information so that the entire planet into a global village. To the digital and network characteristics of information technology into the same
5、 general technical different, it is highly permeable and infrastructure, it can infiltrate and transform the various industries and sectors, changes in the production and human lifestyles, changing economic patterns and the social, political, cultural and other fields. And it is one of the foundatio
6、ns of microelectronics technology. It is no exaggeration to say that no progress in microelectronics technology, it is impossible today the vigorous development of information technology, microelectronics has become a cornerstone of the development of the information society.For more than 50 years h
7、istory of the development of microelectronic technology is, in fact, the process of continuous innovation, including innovation here refers to the original innovation, technological innovation and application of innovation. The invention of the transistor is not an isolated carefully designed experi
8、ment, but rather a series of solid physics and semiconductor physics, materials science major breakthrough was achieved after the inevitable result. 1947 point-contact transistor invention, in 1948 invented junction field effect transistor and the subsequent silicon planar technology, integrated cir
9、cuits, CMOS technology, semiconductor random access memory, CPU, non-volatile memory, such as the microelectronics field of the invention are also a series of major innovation results manifest. At the same time, each of the major inventions are also open up a new field, has brought new huge market f
10、or our production and lifestyles have had a significant impact. It is precisely due to the field of microelectronics technology innovation can make microelectronic integrated able to quadruple every three years, features smaller times the speed of sustainable development for decades. Since 1968, and
11、 silicon technology-related theses and has already surpassed the number of steel-related academic papers, the view was expressed that, after 1968 following the mankind enters the stone, bronze, iron age after the era of silica (silicon age).Therefore we can say is the essence of social development i
12、nnovation, there is no innovation, the community can only be imprisoned in the super-steady-state trap. Although innovation as a driving force for economic development in the reform of the community will often creativdestruction, but after this destruction, will start at a new higher level of innova
13、tion cycle, society is in such spiral of the way forward.In the microelectronics technology development for the first 50 years, innovation has played a decisive role in the future, the development of microelectronics technology will depend on the outcome of a series of innovative emerging. We believ
14、e that: At present, microelectronic technology has been developed to a very critical period, the first half of the 21st century, which is the next 50 years the development of microelectronics technology trends and the major innovation mainly in the following four aspects: to silicon-based CMOS circu
15、its as the mainstream technology; system-on-chip (System On A Chip SOC) for the development focus of quantum electronic devices and molecules (atoms) self-assembly of nano-technology-based e-learning with other disciplines with the birth of new technology growth points, such as MEMS, such as DNA Chi
16、p.221 century will continue to the first half of the silicon-based CMOS circuits of the mainstreamMicroelectronics technology development goal is to continuously improve the performance of the system integration and cost-effective, and therefore call for an increase in chip integration, which is con
17、stantly shrinking semiconductor devices feature size power source. To MOS technology as an example, narrowing the channel length can increase the speed of integrated circuits; at the same time narrowing the channel length and width can be reduced device size, integration, the chip integrates a great
18、er number of transistors, the structure will be more complicated, Performance improved in the electronic system integration on a single chip; In addition, with the enhancement of integration, the systems speed and reliability have also greatly improved, a sharp price drop. The on-chip signal delay o
19、f less than the signal delay chip, so the device smaller, even if the device itself does not enhance performance, the performance of the integrated system can be greatly improved. Since the invention of the integrated circuit in 1958, in order to enhance the performance of electronic systems, reduce
20、 costs, and microelectronic devices feature size is shrinking, continuously improve processing accuracy, and the silicon area escalating. The development of integrated circuit chips basically followed the Intel co-founder of the Gordon E. Moore predicted by Moores Law in 1965, that is, every three y
21、ears of integration increased four times, feature smaller times. During this period, although there are many who predict this trend will slow, but the development of the microelectronics industry for more than 30 years the situation confirmed Moores prediction 2. And according to our projections, th
22、e development of microelectronic technology of this trend will continue in the 21st century, a period of time, it is any other industry can match the.Now, 0.18-micron CMOS process technology in the microelectronics industry has become a mainstream technology, 0.035 and 0.020 micron micron device has
23、 been successful in the laboratory preparation, research work has entered the sub-0. 1-micron technology stage, the corresponding gate oxide thickness of only 2.0 to 1.0 nm. It is estimated that by 2010, the feature size of 0.05 to 0.07 microns 64 GDRAM products will be in production. The 21st centu
24、ry, at least the first half of the 21st century, microelectronics production technology will continue to reduce the size of the silicon-based CMOS process technology into the mainstream. Although micro-electronics and other compounds in the research of new materials made a lot of progress, but not r
25、eplace silicon-based technology with the conditions. According to the laws governing the development of science and technology, from the birth of a new technology to become a mainstream technology generally require 20 to 30 years, silicon integrated circuit technology since the invention of transist
26、ors in 1947 invention of the integrated circuit in 1958 to the late 1960s also develop into a major industry after more than two decades of time. In addition, around the world in trillions of dollars in equipment and technology, has been a very powerful silicon-based technology industry capacity; At
27、 the same time, long-term research and development investments have been causing people to silicon and its derivatives to various attributes of a very in-depth understanding of very thorough state, as more than 100 kinds of natural elements, the most This is a very valuable accumulation of knowledge
28、. Industry capacity decisions and the accumulation of knowledge of the silicon-based technology will be at least 50 years still play an important role, people will not give up easily. At present, many people think that when the feature size of microelectronics technology in 2015reached 0.030 0.015 m
29、icrons, limit, the silicon technology will be the end of the era, and this is actually a misunderstanding. Leaving aside the microelectronics technology in addition to representatives of feature size of the processing technology, but alsodesign, system architecture, and other aspects of the strong n
30、eed for further development of these technologies will enable the development of the microelectronics industry to continue its rapid growth. Even the processing technology, many well-known in the microelectronics experts also predicted that the microelectronics industry will be like in 2030 about en
31、tering the auto industry, the aviation industry, this relatively mature Chaoyang industrial fields. Even if the microelectronics industry into the automotive, aerospace and other industrial sectors mature, it will continue to maintain a rapid development trend, like automotive, aerospace industry ha
32、s developed more than 50 years is still the same great development potential.With the device feature size is getting smaller and smaller, will inevitably encounter device structure, the key technology, integration technologies and materials in a series of problems, the reason is mainly: The laws of
33、physics, and other scientific awareness of the problem also remain in the birth and development ofintegratedcircuits formed by the early classical or semi-classical theory on the basis of these theories to describe micron for the microelectronics devices, but the space for nano-scale magnitude and s
34、patial scales of the order of femtosecond of the new system-on-chip device is difficult to apply in the material system, the SiO2 gate dielectric material, polysilicon / silicide gate electrode, and other traditional materials due to the material properties of the constraints, have failed to meet th
35、e 50-nanometer devices and circuits in demand At the same time the structure of the traditional devices have failed to meet the 50-nanometer devices, we must develop a new type of device structure and micro-machining, interconnection, and integration of key technology. Specific needs innovation and
36、the development of key areas, including: Based on quantum physics and mesoscopic semiconductor devices based on the transport theory, the device model, simulation and simulation software, the new device structure, high-k gate dielectric material and a new gate structure, and electron beam stepper, 1
37、3 nmEUV lithography, etching ultrafine lines, SOI, GeSi / Si, and other silicon-based technology compatible with the new circuit, and low-K dielectric Cu interconnect devices and nanotechnology and quantum electronic devices and the integration of technology .3system-on-chip (System On A Chip) is a
38、21st century focus on the development of microelectronic technologyIn the integrated circuit (IC) the early stage of development, circuit design are from the physical layout device start later in the unit for integrated circuits (Cell-Lib), made from the device-level integrated circuit design into t
39、he logic level, the design of such a large number of circuit and logic designers can directly participate in the design of integrated circuits, and greatly promote the development of the IC industry. But IC is only a semi-finished, it only complete machine system can be put into play its role. IC ch
40、ip through the printed circuit board (PCB) techniques to achieve complete machine system. Although the IC can be very high speed, power consumption can be very small, but because of PCB board connection between the IC chip delay, PCB board reliability and weight and other factors, complete machine s
41、ystem performance by a lot of restrictions. With the system to the high-speed, low-power, low-voltage and multi-media, network, and the development of mobile, the system of the increasingly high demands of the circuit, the traditional integrated circuit design technology has been unable to meet the
42、increasing performance of the complete machine system requirements . At the same time, IC design technology and the level of integrated circuit scale is growing, becoming more complex, the whole system can be integrated into a single chip. Now can be integrated in a chip 108-109 transistors, and alo
43、ng with the development of microelectronics manufacturing technology, the 21st century microelectronics technology from the current 3 times the progressive development of G T to 3 times (that is, by the G-storage development T-bit, integrated circuit devices from the speed of light to the developmen
44、t of THz GHz, the data transfer rate from Gbps development Tbps, Note: 1 G = 109,1 T = 1012, bps: median per-second data transmission). It is in traction and technology-driven demand for the dual role, there will be a system-wide integrated microelectronics chip system-on-chip (System On A Chip, or
45、SOC) concept. System-on-Chip (SOC) integrated circuits (IC) design idea is different, it is the field of microelectronics design a revolution, and integrated circuits, and then the relationship between the IC and discrete components similar to the relationship, its micro - Electronics role in promot
46、ing inferior since the late 1950s with the rapid development of integrated circuit technology.SOC is from the perspective of the whole system, a mechanism for handling model algorithm, the chip architecture, the circuit level until the devices are designed to closely integrate, in a single (or a few
47、) chip to complete the function of the system as a whole, it must be designed Behavioral system from the beginning of top-down (Top-Down). Many studies show that the system and IC components compared to SOC design as integrated and holistic consideration of the various situations throughout the syst
48、em, in the same process technology to achieve better performance under the conditions of the target system. For example, the use of methods and SOC 0.35 m system-on-chip design technology, the complexity of the systems in the same degree and handling rate, equivalent to a 0.18 to 0.25 m IC productio
49、n process achieved by the same system performance; Also, using conventional IC chip design method compared with SOC design methodology required to perform the same function of the number of transistors can be reduced about l 2 orders of magnitude. The system-on-chip (SOC) development, there are three key technical support.(1) hardware and software co-design technology. Different systems for the hardware and software functional theory (Functional Partition Theory), where the system involves many different comput
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